Application of time - optimal auto - alignment system in DSW photolithog - raphic process is investigated in this paper.

本文研究了最 短时 问控制系统在DSW光刻机自动对准系统中的应用问题.

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A novel method for measuring - line depth of focus ( DOF ) of a lithographic projection system is proposed.

提出了一种检测光刻机投影物镜密集线焦深 ( DOF ) 的新技术.

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The principle and implementation of high precision video based alignment system are described.

阐述高分辨力光刻机的图像对准系统的原理及实现过程.

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Application of time - optimal auto - alignment system in DSW photolithog - raphic process is investigated in this paper.

本文研究了最 短时 问控制系统在DSW光刻机自动对准系统中的应用问题.

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A novel in - situ non - flatness measurement method of wafer chuck in step - and - scan projection lithographic tool is presented.

提出一种步进扫描投影 光刻机 承片台不平度检测新技术.

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